Hexamethyldisilazane, Electronic/Cleanroom Grade
HMDS
Packaged in a cleanroom environment.
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Chemical Formula |
C6H19NSi2 |
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Molecular Weight |
F.W. 161.40 |
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CAS # |
999-97-3 |
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Safety Information |
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Health Hazard |
3 |
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Fire Hazard |
3 |
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Reactivity |
1 |
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Test |
Specification |
| Assay (C6H19NSi) | Min. 99.0% |
| Refractive Index | 1.4050-1.4060 |
| Trailing Impurities (Area %) | Approx. 0.1 |
| MAXIMUM LIMITS | |
| Color (APHA) | 10 |
| Absorbance @ 270 nm | 0.25 |
| Turbidity | 1.0 NTU |
| Water | 50 ppm |
| Residue after Ignition | 10 ppm |
| Chloride (Cl) | 2 |
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Shipping Information |
Flammable liquid, toxic, corrosive, n.o.s. (hexamethyldisilazane), 3, UN3286, PG II. Additional UPS-imposed hazardous material charge plus $15.00 for poison pack. |
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UPS limit |
1 L |
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Storage Information |
MOISTURE SENSITIVE: Keep tightly closed. |
Chemical information and descriptions have been provided by Spectrum Chemicals.
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